Linear Stages
Precision Crossed Roller Bearing Linear Stages
ALIO's Nano Precision XY Monolithic product is a 3-plate systems with unmatched 6-D performance. With years of testing, continually improving designs and unique manufacturing protocols, the ALIO precision crossed roller bearing stages have no equal for quality and performance. Our linear stage product family, as shown below with counterbalance for Z applications, begin with 25 mm travel and go up to 400 mm of travel with motor and encoder options to fit your application needs.
Linear CM Servo Motor
ALIO designed CM linear servo stages for customers that need less costly True Nano® precision. CM servo motor stages still have the ALIO 6-D precision with less linear force for smaller and lower acceleration applications. The stage family uses the precision anti-skid bearings as all other ALIO mechanical bearing products with the same 25 mm to 400 mm travel ranges.
Z-Lift and Vertical Axis Motion Systems
ALIO Industries’ Z-Lift motion platforms were created to replace the inaccuracies of the ever present Z-Wedge vertical stages as well as reduce the footprint and improve performance of linear stages mounted in the vertical orientation. Every component in a motion stage adds to the total error. Since Z-wedges have a minimum of three machined components with complex angles, three sets of bearings, a motor via a coupling and an encoder, the result is a very inaccurate stage.
ALIO answers this with a family of very high accuracy, high repeatable vertical stages.
XY Linear System
ALIO’s XY monolithic True Nano® motion systems performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family comes with enclosed or open center versions from 50mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.
µ-II Motion Systems
ALIO has introduced its new µII (micro II) product (High Precision Motion Systems) line to compete in the lower cost, lower precision micron (µm) world. Demands for low cost, mid-precision, reliable long travel stages influenced ALIO decision as well as our loyal customer base to move into this market. As with all ALIO products, this line was designed using ALIO’s uncompromising standards of “quality first” thus providing the customer with long term reliable operation.
These easily configurable stages can be used as a single axis, stacked in XY orientations or complete gantry operation. ALIO’s controls platforms are easily set up to handle the complex motion requirements for rigid gantry motion.
The µII recirculating ball rail bearing stage line comes standard in sizes of 100mm up to 1 meter thus providing the end-user a solution for many applications.
Rotary Stages
Mechanical Rotary Stages
Mechanical bearing rotary stages have been designed with crossed roller bearings for improved stiffness for offset loads and rotational precision. Integrated with servo torque frameless motors these stage can handle most application where the mass and acceleration needs are extreme while still maintaining our nano precision performance. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra-machined parallel surfaces as shown by the machined lands on all stages.
ALIO rotary stages have standard with 0.2 arc-second repeatability with the ALIO supplied motion controllers. Standard mechanical crossed roller bearings are rated at 13 to 20 microns of radial and axial run-out with optional run-outs of certain models below 5 microns.
The mechanical bearing rotary stage family has multiple motor sizes to meet duty cycles as well as mass and acceleration needs from 80 mm to 300 mm in diameter.
Vacuum Rotary Union options are available on the inner diameter for mounting a Vacuum Chuck.
Low-Angle Mechanical Rotary Stages
Mechanical bearing rotary stages have been designed with angular contact bearings for the most compact design on teh market. Integrated with servo ironless motors these stage best fit metrology applications where small angular adjustment is needed with nano precision performance. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra-machined parallel surfaces as shown by the machined lands on all stages.
ALIO rotary stages have standard with 0.2 arc-second repeatability with the ALIO supplied motion controllers. Standard mechanical crossed roller bearings are rated at 13 to 20 microns of radial and axial run-out with optional run-outs of certain models below 5 microns.
The mechanical bearing rotary stage family has multiple motor sizes to meet duty cycles as well as mass and acceleration needs from 80 mm to 300 mm in diameter.
Vacuum Rotary Union options are available on the inner diameter for mounting a Vacuum Chuck.
Air Bearing Rotational Stages
When ultra-tight run-out precision motion is needed, customers can choose from our continually growing line of air bearing rotary stages. Whether it is exceptional stiffness or cost effective motion, ALIO can offer a variety of options to meet the needs of today’s nano-precision applications.
Vacuum Rotary Union options are available on the inner diameter for mounting a Vacuum Chuck.
Dual Axis Rotary Systems
ALIO's two-axis systems are designed around the customers' mass with variable counterbalance, cable guidance, cable and air feed-through capabilities. With hard-stops allowing for ± 110 and ± 170 degrees of rotation for nearly unlimited part access on the horizontal axis. Angular travel ± 180 for the rotation about the vertical axis.
Contact ALIO with your specs, motion requirements, and budget to get pricing today.
Hybrid Hexapod
ALIO brings a revolutionary new approach to 6D motion. ALIO Hybrid Hexapod® Systems introduce increased rigidity to the linkages and maintain sub-micron positioning which together provides the most precise positioning possible.
Forward & Inverse Kinematics: Calculating where you are and your destination allows ALIO to calculate a smooth path to the target position. Example: your mirror will travel along an arced path towards your destination instead of “dancing at various angles” in an approach to the target location.
Download: Hybrid Hexapod Motion Explanation
Hybrid Hexapod Mini
Currently the smallest of our Hybrid Hexapod® line, the MINI is compact and still provides a 54,000 mm2 working volume (60x60x15mm). With the flexibility to add this tripod and rotary to a larger, monolithic XY, you can size your MINI to your working volume. Brakes, gear reduction, ball screw drive, and linear motor drive are some of the options to match the performance to your application.
Hybrid Hexapod
The evolution of the Hexapod 6 axis motion system is the Tripod integrated with nano precision stages and a rotary for 6 axes of True Nano® precision. This platform due to basic physics can out perform Hexapod systems with Nano Precision ® while increasing the work envelope and significantly increasing the stiffness of the structure making this platform ideal for nano machining and thermal bonding applications where reactive forces are common. The ALIO product family of Linear Servo Tripods can be packaged from 3 axes to more than 6 axes while still maintaining the ALIO forward and inverse kinematic equations.
µ-II Stepper Drive Hybrid Hexapod
The Micron-2 Stepper Hybrid Hexapod is a variation from our unmatched precision Hybrid Hexapod®. The Stepper version is designed with the same rigid structure and closed-loop feedback providing unmatched performance and pricing. This product is scalable up to much larger strokes and higher loads. Contact ALIO to discuss your application.
Custom Systems
ALIO Industries offers significant value added by customizing our core technology to fit our OEM customer’s needs as well as pushing the envelope for new world nano-precision applications. ALIO’s on-going focus on exceeding OEM requirements helps our customers become leaders in their industry.
Customers approach ALIO for unique applications due to our long track record of successfully delivering complex prototypes that meet or exceed specifications the first time.
ALIO’s unwavering focus on honesty and integrity help customers understand the complex nature of precision applications. ALIO informs the customer of what they need to know and not just what they want to hear.
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